DocumentCode :
3384632
Title :
Optimization of growth conditions for the OMVPE grown InAsP/InP quantum well
Author :
Kim, Jeong Soo ; Kim, Hyung Mun ; Suh, Kyung-Soo ; Kim, Hye Rim ; Lee, Seung Won ; Choo, Heung Ro ; Kim, Hong Man ; Pyun, Kwang Eui
Author_Institution :
Semicond. Dept., Electron. & Telecommun. Res. Inst., Taejon, South Korea
fYear :
1996
fDate :
21-25 Apr 1996
Firstpage :
482
Lastpage :
485
Abstract :
We have investigated the optical quality of a InAsP/InP single quantum well with a 40 Å well thickness grown by organo metallic vapor phase epitaxy at various growth conditions such as growth temperature, V/III ratio, and growth rate, using room temperature photoluminescence (PL) and high resolution X-ray diffraction. The full width at half maximum of PL peaks always increases with the increase of As composition regardless of the growth conditions. However, we observe several different behaviors of PL peak broadening depending on the growth conditions. This different behavior is well described as a function of AsH3 flow rate. Based upon our results, we suggest that relatively low growth temperature and low V/III ratio are suitable for the growth of high quality InAsP/InP quantum well structure
Keywords :
III-V semiconductors; X-ray diffraction; indium compounds; photoluminescence; semiconductor growth; semiconductor quantum wells; spectral line broadening; vapour phase epitaxial growth; 40 A; As composition; AsH3 flow rate; InAsP-InP; OMVPE grown InAsP/InP quantum well; PL peak; PL peak broadening; V/III ratio; full width at half maximum; growth conditions; growth rate; growth temperature; high quality InAsP/InP quantum well structure; high resolution X-ray diffraction; low V/III ratio; low growth temperature; optical quality; optimization; organo metallic vapor phase epitaxy; room temperature photoluminescence; single quantum well; well thickness; Epitaxial growth; Indium phosphide; Lattices; Optical diffraction; Optoelectronic devices; Photoluminescence; Quantum well devices; Substrates; Temperature; X-ray diffraction;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Indium Phosphide and Related Materials, 1996. IPRM '96., Eighth International Conference on
Conference_Location :
Schwabisch-Gmund
Print_ISBN :
0-7803-3283-0
Type :
conf
DOI :
10.1109/ICIPRM.1996.492287
Filename :
492287
Link To Document :
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