Title :
Aluminum Nitride reconfigurable RF-MEMS front-ends
Author :
Tazzoli, Augusto ; Rinaldi, Matteo ; Zuo, Chengjie ; Sinha, Nipun ; Van der Spiegel, Jan ; Piazza, Gianluca
Author_Institution :
Dept. of Electr. & Syst. Eng., Univ. of Pennsylvania, Philadelphia, PA, USA
Abstract :
Aluminum Nitride based piezoelectric microelectromechanical systems (MEMS) technology has the potential to develop a fully integrated radio frequency (RF) platform that satisfies the requirements of next-generation communication standards: reconfigurability, miniaturization, and low power consumption. Here we report on the recent developments of this AlN thin-film based technology, namely resonators, filters, oscillators and switches. These examples highlight how MEMS will enable the mass manufacturing of reconfigurable RF front-ends.
Keywords :
aluminium compounds; band-pass filters; low-power electronics; micromechanical resonators; piezoelectric thin films; radiofrequency oscillators; AlN; AlN thin film; aluminum nitride; filters; low power consumption; miniaturization; next-generation communication standards; oscillators; piezoelectric microelectromechanical systems; reconfigurable RF-MEMS front-ends; resonators; switches; Charge coupled devices; Radio frequency; Resonant frequency; Wireless communication;
Conference_Titel :
ASIC (ASICON), 2011 IEEE 9th International Conference on
Conference_Location :
Xiamen
Print_ISBN :
978-1-61284-192-2
Electronic_ISBN :
2162-7541
DOI :
10.1109/ASICON.2011.6157387
