Title :
Micromachined Transmission Lines for Millimeter-Wave Applications
Author :
Llamas-Garro, Ignacio ; Corona-Chavez, Alonso
Author_Institution :
Seoul National University, Korea
Abstract :
Several different fabrication techniques and materials have been proposed for making low loss high performance micromachined transmission lines. In this paper a review of several micromachined transmission lines that have been proposed over the last years are classified into four types according to their physical structure and their power losses addressed.
Keywords :
Conducting materials; Coplanar transmission lines; Etching; Fabrication; Millimeter wave technology; Power transmission lines; Propagation losses; Radio frequency; Silicon; Transmission lines;
Conference_Titel :
Electronics, Communications and Computers, 2006. CONIELECOMP 2006. 16th International Conference on
Print_ISBN :
0-7695-2505-9
DOI :
10.1109/CONIELECOMP.2006.40