Title :
Statistical process simulation with neural network single step feed-back for automatic process monitoring and control
Author :
Chen, Vincent M C ; Lin, Yung-Tao ; Peng, Yeng-bung
Author_Institution :
Submicron Dev. Center, Adv. Micro Devices, Sunnyvale, CA, USA
Abstract :
This project integrates flexible data collection module, relational database, manufacturing execution system (MES) interface, and a simulation system that employs statistical approach and advanced numerical processing methodology. Concept of process-step-decoupling using statistical data correlation and automatic simulation calibration are implemented. The purpose is to have an accurate system that satisfies manufacturing requirements and at the same time a flexible system that satisfies development requirements. This tool is practical in the sense that the maintenance, employment and development cycle are in synchronize with the technology development cycle, and hence the help that the engineer needed can be provides at the right time
Keywords :
production engineering computing; recurrent neural nets; semiconductor process modelling; statistical process control; automatic calibration; data correlation; flexible data collection module; manufacturing execution system interface; neural network; numerical processing; process control; process monitoring; process step decoupling; relational database; single step feedback; statistical process simulation; Analytical models; Automatic control; Calibration; Computerized monitoring; Data engineering; Manufacturing processes; Neural networks; Physics; Process control; Silicon;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1997. IEEE/SEMI
Conference_Location :
Cambridge, MA
Print_ISBN :
0-7803-4050-7
DOI :
10.1109/ASMC.1997.630701
