Title :
Optical actuation of micromechanical tunneling structures
Author :
Dragoman, M. ; Dragoman, D.
Author_Institution :
Nat. Res. & Dev. Inst. in Microtechnol., Bucharest, Romania
Abstract :
An efficient method to optically actuate a micromechanical cantilever is presented. Measurable responses are obtained for moderate light sources if electron tunneling occurs between the cantilever tip and a metallic contact below it. The small cantilever deflection due to light pressure produces large tunneling current variations. Several applications are presented
Keywords :
microactuators; radiation pressure; tunnelling; electron tunneling; light pressure; micromechanical cantilever; optical actuation; Atom optics; Electron optics; Iron; Micromechanical devices; Optical beams; Optical materials; Optical microscopy; Optical reflection; Tunneling; Voltage;
Conference_Titel :
Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-5139-8
DOI :
10.1109/SMICND.1999.810584
