Title :
Guided-wave Si CMOS process-compatible optical interconnects
Author :
Chen, R.T. ; Wu, L. ; Lin, L. ; Choi, C. ; Liu, Y. ; Bihari, B. ; Tang, S. ; Wickman, R. ; Picor, B. ; Liu, Y.S.
Author_Institution :
Microelectron. Res. Center, Texas Univ., Austin, TX, USA
Abstract :
We report the formation of polyimide-based H-tree waveguides for a multi-GBit/sec optical clock signal distribution in a Si CMOS process compatible environment. Such a clock distribution system is to replace the existing electronic counterpart associated with high-speed supercomputers such as Cray T-90 machine
Keywords :
CMOS integrated circuits; clocks; optical interconnections; optical polymers; optical waveguides; Cray T-90; Si; Si CMOS process; guided wave optical interconnect; high-speed supercomputer; optical clock signal distribution; polyimide H-tree waveguide; Arrayed waveguide gratings; CMOS process; Clocks; High speed optical techniques; Integrated circuit interconnections; Optical interconnections; Optical waveguide theory; Optical waveguides; Supercomputers; Vertical cavity surface emitting lasers;
Conference_Titel :
Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-5139-8
DOI :
10.1109/SMICND.1999.810587
