DocumentCode
3386169
Title
Analysis of electrical test data using a neural network approach
Author
Koppenhoefer, B. ; Wuerthner, S. ; Ludwig, L. ; Rosenstiel, W. ; Kuge, H.-H. ; Hummel, M. ; Federl, P.
Author_Institution
Inst. fur Organische Chem., Tubingen, Germany
fYear
1997
fDate
10-12 Sep 1997
Firstpage
37
Lastpage
41
Abstract
This project aims at the development of new and fast tools helping to interpret the results of electrical measurements of chips (functional data) and of test structures between the chips, the so called process control monitors (PCM). The goal is to recognize and classify deviations in these results as soon as they become available so that process corrections can be implemented more quickly
Keywords
data analysis; integrated circuit testing; process control; self-organising feature maps; SOM; electrical test data analysis; functional data; neural network; process control monitor; semiconductor manufacturing; Chemical technology; Data analysis; Electric variables measurement; Fingerprint recognition; Manufacturing processes; Neural networks; Phase change materials; Productivity; Semiconductor device manufacture; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 1997. IEEE/SEMI
Conference_Location
Cambridge, MA
ISSN
1078-8743
Print_ISBN
0-7803-4050-7
Type
conf
DOI
10.1109/ASMC.1997.630702
Filename
630702
Link To Document