Title :
Temperature microsensors
Author :
Mitin, V.F. ; Kholevchuk, V.V. ; Konakova, R.V. ; Boltovet, N.S.
Author_Institution :
Inst. of Semicond. Phys., Acad. of Sci., Kiev, Ukraine
Abstract :
We have developed and investigated several types of miniature cryogenic resistance thermometers based on germanium films on gallium arsenide and silicon thermodiode temperature sensors. A small-scale production of these devices is organized. The temperature measurement intervals of the resistance thermometers cover the 25 mK to 300 K temperature range, while those of thermodiodes cover the 4 to 600 K temperature range
Keywords :
elemental semiconductors; germanium; low-temperature techniques; microsensors; resistance thermometers; silicon; temperature sensors; 25 mK to 300 K; 4 to 600 K; GaAs; Ge; Si; cryogenic resistance thermometer; gallium arsenide substrate; germanium film; silicon thermodiode; temperature measurement; temperature microsensor; Cryogenics; Gallium arsenide; Germanium; Microsensors; Production; Semiconductor films; Silicon; Temperature distribution; Temperature sensors; Thermal resistance;
Conference_Titel :
Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-5139-8
DOI :
10.1109/SMICND.1999.810593
