• DocumentCode
    3386218
  • Title

    Structural and dimensional effects in electrical conductivity of SnO2 thin films used for gas sensors

  • Author

    Ivashchenko, Anatolii ; Kerner, Iacov

  • Author_Institution
    Inst. of Appl. Phys., Acad. of Sci., Kishinev, Moldova
  • Volume
    2
  • fYear
    1999
  • fDate
    36434
  • Firstpage
    499
  • Abstract
    Electrical conductivity in SnO2 thin films near 3D-2D transition is studied within the framework of percolation theory,. Four various approaches modeling film microstructure were used. The model of weekly textured polycrystal gives the best agreement between experimental and theoretical data
  • Keywords
    electrical conductivity; gas sensors; percolation; semiconductor materials; semiconductor thin films; tin compounds; 3D-2D transition; SnO2; SnO2 thin film; electrical conductivity; gas sensor; microstructure; percolation model; polycrystalline texture; Chemical sensors; Conducting materials; Conductive films; Conductivity; Gas detectors; Grain size; Physics; Semiconductor films; Thin film sensors; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International
  • Conference_Location
    Sinaia
  • Print_ISBN
    0-7803-5139-8
  • Type

    conf

  • DOI
    10.1109/SMICND.1999.810594
  • Filename
    810594