DocumentCode
3386218
Title
Structural and dimensional effects in electrical conductivity of SnO2 thin films used for gas sensors
Author
Ivashchenko, Anatolii ; Kerner, Iacov
Author_Institution
Inst. of Appl. Phys., Acad. of Sci., Kishinev, Moldova
Volume
2
fYear
1999
fDate
36434
Firstpage
499
Abstract
Electrical conductivity in SnO2 thin films near 3D-2D transition is studied within the framework of percolation theory,. Four various approaches modeling film microstructure were used. The model of weekly textured polycrystal gives the best agreement between experimental and theoretical data
Keywords
electrical conductivity; gas sensors; percolation; semiconductor materials; semiconductor thin films; tin compounds; 3D-2D transition; SnO2; SnO2 thin film; electrical conductivity; gas sensor; microstructure; percolation model; polycrystalline texture; Chemical sensors; Conducting materials; Conductive films; Conductivity; Gas detectors; Grain size; Physics; Semiconductor films; Thin film sensors; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International
Conference_Location
Sinaia
Print_ISBN
0-7803-5139-8
Type
conf
DOI
10.1109/SMICND.1999.810594
Filename
810594
Link To Document