Modeling and design of a micromachined Fabry-Perot interferometer

Author

Bostan, C.-G. ; Avraynescu, V.

Author_Institution

Nat. Inst. for Res. & Dev. in Microtechnol., Bucharest

Volume

2

fYear

1999

fDate

36434

Firstpage

535

Abstract

A physical model and its application to the design of a micromachined low-order tunable Fabry-Perot interferometer are discussed. The optical properties of the thin films as well as their surface defects are taken into account. The dependence of the free spectral range and the transmission bandwidth on the phase change which occurs on reflection are emphasized. A computer program written in MATLAB was applied to a particular structure

Keywords

Fabry-Perot interferometers; micro-optics; micromachining; mirrors; optical design techniques; optical filters; optical transfer function; optical tuning; computer program; design; electrostatically varied gap spacing; free spectral range; intensity transfer function; low-order tunable interferometer; micromachined Fabry-Perot interferometer; multilayer mirrors; optical properties; phase change on reflection; physical model; single cavity; surface defects; thin films; transmission bandwidth; tunable high-finesse spectral filter; Fabry-Perot interferometers; Laser tuning; Optical films; Optical filters; Optical interferometry; Optical reflection; Optical refraction; Optical scattering; Optical sensors; Optical variables control;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International

Conference_Location

Sinaia

Print_ISBN

0-7803-5139-8

Type

conf

DOI

10.1109/SMICND.1999.810603

Filename

810603