DocumentCode
3386825
Title
Bias and temperature dependent hot-carrier characteristics of sub-100 nm partially depleted SOI MOSFETs
Author
Zhao, Eugene-Xuejun ; Chan, Jay ; Zhang, John ; Marathe, Amit ; Taylor, Kurt
Author_Institution
AMD, Sunnyvale, CA, USA
fYear
2002
fDate
21-24 Oct. 2002
Firstpage
113
Lastpage
115
Abstract
In this paper, we report hot-carrier behavior of sub-100 nm partially depleted SOI MOSFETs at room (25C) and high temperature (100C) under various stress conditions. It was observed that VG=VD was the worst case and more sensitive to temperature variation. SOI is more sensitive to operation temperature than bulk transistors. Hot carrier activation energy has also been extracted in the experiments.
Keywords
MOSFET; hot carriers; silicon-on-insulator; 100 C; 100 nm; 25 C; activation energy; bias dependence; hot carrier characteristics; partially-depleted SOI MOSFET; temperature dependence; Charge pumps; Hot carriers; Human computer interaction; Interface states; MOSFETs; Silicon on insulator technology; Stress; Temperature dependence; Temperature sensors; Thermal degradation;
fLanguage
English
Publisher
ieee
Conference_Titel
Integrated Reliability Workshop Final Report, 2002. IEEE International
Print_ISBN
0-7803-7558-0
Type
conf
DOI
10.1109/IRWS.2002.1194245
Filename
1194245
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