DI water tribocharging damage at CMP

Author

Lloyd, Brian ; Zeid, Fred

fYear

2002

fDate

21-24 Oct. 2002

Firstpage

202

Lastpage

203

Abstract

A simple detection method for tribocharging of DI water (- 17M Ohm-cm) when traveling through PTFE, PVD and PVC tubing and exit nozzles is discussed. Tribocharge potentials between 10 and 200 volts are measured by direct probing of the DI water exit stream with an electrometer at low flow rates (-1 to 6 liters/minute) at the rinse station of a CMP tool used in the disk magnetic storage read head assembly process. The electrometer probe can be incorporated into the DI water conduit system for in situ measurement. A grounded metal exit nozzle is introduced and shown to eliminate the charge in the DI water without the addition of chemicals that may present integration or reliability problems.

Keywords

chemical mechanical polishing; electrometers; magnetic heads; surface charging; voltage measurement; 10 to 200 V; DI water; PTFE tubing; PVC tubing; PVD tubing; chemical-mechanical polishing; disk magnetic storage read head assembly process; electrometer probe; exit nozzle; potential measurement; rinse station; tribocharging damage detection; Charge measurement; Current measurement; Magnetic heads; Magnetic memory; Magnetic separation; Magnetic shielding; Monitoring; Plasma measurements; Spraying; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Integrated Reliability Workshop Final Report, 2002. IEEE International

Print_ISBN

0-7803-7558-0

Type

conf

DOI

10.1109/IRWS.2002.1194269

Filename

1194269