On-chip electro-thermal stimulus generation for a MEMS-based magnetic field sensor

This paper introduces some practical BIST solutions as a basis for a future self-testable MEMS-based magnetic field sensor. It is demonstrated that slight modifications of the system architecture can be used to allow both on-chip generation of electro-thermal stimuli and preprocessing of the sensor response. The external response analysis and thus the test procedure are then strongly simplified and require only a standard digital automatic test equipment.