Title :
Gallium arsenide based micro-accelerometers
Author :
Vu, T.T. ; Nguyen, P.C. ; Vu, L.T. ; Nguyen, C.H. ; Vu, J.N.C. ; Polla, D.L. ; Schiller, P.J. ; Stevanovich, S. ; Li, H.Y. ; Yang, Y.Q. ; Harjani, R.
Author_Institution :
Top-Vu Technol. Inc., St. Paul, MN, USA
Abstract :
Gallium arsenide (GaAs) based micro-accelerometers are being developed for guidance and navigation subsystems, and various microsensor systems. The micro-accelerometer is a microelectromechanical system (MEMS) micromachined on top of a GaAs substrate or GaAs integrated circuits. The MEMS accelerometer is integrated on the same chip as the GaAs readout circuit and the GaAs analog to digital converter. Test and prototype chips are developed.
Keywords :
III-V semiconductors; accelerometers; ferroelectric thin films; gallium arsenide; integrated circuit technology; micromachining; microsensors; monolithic integrated circuits; piezoelectric transducers; sol-gel processing; GaAs; GaAs ADC; GaAs readout circuit; GaAs substrate; MEMS accelerometer; analog/digital converter; cantilever microbeam; microaccelerometers; microelectromechanical system; micromachined sensor; microsensor; Accelerometers; Circuits; Coatings; Gallium arsenide; Microelectromechanical systems; Micromechanical devices; Microsensors; Navigation; Piezoelectric materials; Sensor systems;
Conference_Titel :
Circuits and Systems, 1997. Proceedings of the 40th Midwest Symposium on
Print_ISBN :
0-7803-3694-1
DOI :
10.1109/MWSCAS.1997.662272
