Title :
Tailoring of chemical, morphological, and mechanical surface properties of materials with laser radiation
Author_Institution :
Tech. Hochschule Aachen, Germany
Abstract :
Following the requirements for present microsystems the necessary resolutions are restricted to about 100 /spl Aring/ in vertical direction and to higher than 10 /spl mu/m in lateral direction, respectively. The author shows that laser radiation has now found confirmed applications in the prototyping stages of device engineering and is now on the edge of also becoming a cornerstone technology in manufacturing of leading-edge devices.
Keywords :
laser materials processing; semiconductors; surface chemistry; surface structure; surface treatment; 10 mum; 100 A; chemical properties; laser radiation; leading-edge devices; mechanical surface properties; microsystems; morphological properties; prototyping stages; resolution; Chemical lasers; Lithography; Mechanical factors; Microelectronics; Optical devices; Optical materials; Packaging; Semiconductor materials; Surface emitting lasers; Surface morphology;
Conference_Titel :
Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:
Conference_Location :
Keystone, CO, USA
Print_ISBN :
0-7803-3175-3
DOI :
10.1109/LEOSST.1996.540675
