High speed localized cooling using SiGe superlattice microrefrigerators

Author

Zhang, Yan ; Christofferson, James ; Shakouri, Ali ; Zeng, Gehong ; Bowers, John E. ; Croke, Ed

Author_Institution

Electr. Eng. Dept, California Univ., Santa Cruz, CA, USA

fYear

2003

fDate

11-13 March 2003

Firstpage

61

Lastpage

65

Abstract

In this paper, thin film based SiGe superlattice microrefrigerators are fabricated and characterized in terms of maximum cooling, power density and transient response. The localized cooling and fast transient response, less than 40 μs, demonstrate the potential for hot spot cooling of optoelectronics, microprocessor and IC chips.

Keywords

Ge-Si alloys; cooling; semiconductor materials; semiconductor superlattices; thermal management (packaging); thermoelectric devices; thin film devices; transient response; IC chip cooling; SiGe; high speed localized cooling; hot spot cooling; maximum cooling ability; microprocessor cooling; optoelectronics cooling; power density; thermoelectronic devices; thin film SiGe superlattice microrefrigerators; transient response; Cooling; Germanium silicon alloys; Heat sinks; Integrated circuit modeling; Microprocessors; Resistance heating; Silicon germanium; Superlattices; Temperature distribution; Thermoelectricity;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Thermal Measurement and Management Symposium, 2003. Ninteenth Annual IEEE

ISSN

1065-2221

Print_ISBN

0-7803-7793-1

Type

conf

DOI

10.1109/STHERM.2003.1194340

Filename

1194340