Changing from a tool availability approach to a tool efficiency approach

Author

Peter, Ehweiner Hans

Author_Institution

Siemens SA, Corbeil Essonnes, France

fYear

1997

fDate

10-12 Sep 1997

Firstpage

103

Lastpage

108

Abstract

The semiconductor industry is one of the most capital intensive industries. To build a new eight inch fab requires approximately $2 billion dollars for initial startup. This cost tends to increase as the size of the wafers increases. Bearing this in mind, it is very clear that a key measurement for the performance of a fab is the allocation of capital weighted by the tool utilization. If we are measuring the tool utilization by DGR (daily going rate), it is very clear that the tool utilization is directly dependent on the efficiency of the tool set. This paper presents the actions which were taken in Essonnes, France to increase and manage manufacturing efficiency within a fixed budget

Keywords

electronics industry; integrated circuit manufacture; management; planning; production; daily going rate; fixed budget; manufacturing efficiency; semiconductor industry; tool availability approach; tool efficiency approach; tool utilization; wafer fabrication facility; Costs; Dry etching; Electronics industry; Financial management; International collaboration; Logistics; Manufacturing processes; Production facilities; Pulp manufacturing; Random access memory;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference and Workshop, 1997. IEEE/SEMI

Conference_Location

Cambridge, MA

ISSN

1078-8743

Print_ISBN

0-7803-4050-7

Type

conf

DOI

10.1109/ASMC.1997.630715

Filename

630715