Title :
Fabrication of highly ordered hollow oxide nanostructures based on nanoscale Kirkendall effect and ostwald ripening
Author :
Mel, A.E. ; Buffiere, Marie ; Tessier, Pascal ; Wei Xu ; Ke Du ; Chang-Hwan Choi ; Konstantinidis, S. ; Bittencourt, C. ; Snyders, Rony
Author_Institution :
Res. Inst. for Mater. Sci. & Eng., Univ. of Mons, Mons, Belgium
Abstract :
Highly ordered oxide nanotubes are fabricated by a simple two-step method which consists of the magnetron sputtering deposition of copper nanowires on nanograted template surfaces and the thermal oxidation of the nanowires in ambient air at 300 °C. The formation of the organized copper oxide nanotubes is explained according to the nanoscale Kirkendall effect which comes into play at the metal/metal-oxide interface during the annealing process.
Keywords :
annealing; chemical interdiffusion; copper compounds; nanofabrication; nanotubes; nanowires; oxidation; sputter deposition; Ostwald ripening; annealing process; copper nanowires; highly ordered hollow oxide nanostructure fabrication; highly ordered oxide nanotubes; magnetron sputtering deposition; metal-metal-oxide interface; nanograted template surfaces; nanoscale Kirkendall effect; organized copper oxide nanotubes; temperature 300 degC; thermal oxidation; two-step method; Conferences; Decision support systems; Nanoelectronics;
Conference_Titel :
Nanoelectronics Conference (INEC), 2013 IEEE 5th International
Conference_Location :
Singapore
Print_ISBN :
978-1-4673-4840-9
Electronic_ISBN :
2159-3523
DOI :
10.1109/INEC.2013.6465949