• DocumentCode
    3388970
  • Title

    Analysis of gate capacitances in GaAs JFETs

  • Author

    Anholt, R.

  • Author_Institution
    Gateway Modeling Inc., Minneapolis, MN, USA
  • fYear
    1997
  • fDate
    4-7 Oct. 1997
  • Firstpage
    229
  • Lastpage
    232
  • Abstract
    Using two-dimensional simulations, the gate capacitances of n-channel, p-barrier GaAs junction field effect transistors (JFETs) fabricated with ion-implantation and diffused-junction technologies are analyzed. In addition to channel, fringe, and pad capacitances which are also present in GaAs MESFETs, JFETs have sidewall capacitances and a capacitance due to the effective increase in the gate length caused by the lateral spreading of the p dopants. Both of these capacitances can be minimized by reducing the depth of the p region. Sidewall capacitance can be nearly eliminated if the p region depth is less than the depth of the surface depletion in the n region beside the gate. The results are compared with RF data for ion-implanted JFETs.<>
  • Keywords
    III-V semiconductors; capacitance; gallium arsenide; ion implantation; junction gate field effect transistors; simulation; GaAs; JFETs; diffused-junction technologies; gate capacitances; gate length; ion-implantation; junction field effect transistors; lateral spreading; n-channel; p dopants; p-barrier; sidewall capacitances; two-dimensional simulations; Annealing; Capacitance measurement; Doping; Electrical resistance measurement; FETs; Gallium arsenide; Implants; JFETs; MESFETs; Zinc;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Gallium Arsenide Integrated Circuit (GaAs IC) Symposium, 1992. Technical Digest 1992., 14th Annual IEEE
  • Conference_Location
    Miami Beach, FL, USA
  • Print_ISBN
    0-7803-0773-9
  • Type

    conf

  • DOI
    10.1109/GAAS.1992.247263
  • Filename
    247263