DocumentCode :
3389030
Title :
Marathon and IRONMANTM testing of the Trikon Technologies Sigma ForceFillTM
Author :
Strupp, Joel ; Gonzalez, David ; McKeon, Dan ; Saran, Mukul ; Mena, Rafael ; Zuhoski, Steve ; Niemyski, Paul ; Holverson, Pete ; Carrington, Nick ; Butler, David ; Dobson, Chris
Author_Institution :
Texas Instrum. Inc., Dallas, TX, USA
fYear :
1997
fDate :
10-12 Sep 1997
Firstpage :
109
Lastpage :
114
Abstract :
This paper focuses on the testing and improvement of the Trikon Technologies Sigma ForceFillTM tool installed in a pilot line at the TI Dallas Productization Fab, DPI. A series of five tests were run on the system to determine its viability as a volume production tool
Keywords :
aluminium; failure analysis; integrated circuit manufacture; integrated circuit metallisation; production testing; reliability; Al; ForceFill tool; IRONMAN testing; Marathon testing; Sigma platform; Trikon Technologies; high pressure Al plug technology; pilot line; production tool reliability; volume production tool; Aluminum; Atherosclerosis; Instruments; Production; Reliability; Sputter etching; Stability; Stress; System testing; Vacuum systems;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1997. IEEE/SEMI
Conference_Location :
Cambridge, MA
ISSN :
1078-8743
Print_ISBN :
0-7803-4050-7
Type :
conf
DOI :
10.1109/ASMC.1997.630716
Filename :
630716
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3389030
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