Title :
Drive and sense interface for gyroscopes based on bandpass sigma-delta modulators
Author :
Northemann, T. ; Maurer, M. ; Rombach, S. ; Buhmann, A. ; Manoli, Y.
Author_Institution :
Dept. of Microsyst. Eng. (IMTEK), Univ. of Freiburg, Freiburg, Germany
fDate :
May 30 2010-June 2 2010
Abstract :
This paper demonstrates a MEMS gyroscope system with extensive use of sigma-delta (ΣΔ) modulation in both, primary and secondary modes. The primary loop has a bandpass ΣΔ-digital-to-analog converter (DAC) driving the primary mass into resonance, which is implemented on a field programmable gate array (FPGA). With this strategy of shifting the primary oscillation control into the digital domain, the analog circuit complexity is enormously reduced. A continuous-time (CT) fourth-order micro-electro-mechanical ΣΔ Modulator (ΣΔM) incorporating the secondary resonator is used to convert the Coriolis rate signal into a bit stream. This ΣΔM is implemented on PCB performing an in-band noise (IBN) below -60 dBFS.
Keywords :
digital-analogue conversion; field programmable gate arrays; gyroscopes; micromechanical devices; sigma-delta modulation; Coriolis rate signal; DAC; FPGA; MEMS gyroscope system; analog circuit complexity; bandpass sigma delta modulator; continuous time fourth order microelectro-mechanical modulator; digital to analog converter; field programmable gate array; in-band noise; oscillation control; Band pass filters; Consumer electronics; Delta-sigma modulation; Field programmable gate arrays; Frequency; Gyroscopes; Low pass filters; Noise shaping; Resonance; Temperature sensors;
Conference_Titel :
Circuits and Systems (ISCAS), Proceedings of 2010 IEEE International Symposium on
Conference_Location :
Paris
Print_ISBN :
978-1-4244-5308-5
Electronic_ISBN :
978-1-4244-5309-2
DOI :
10.1109/ISCAS.2010.5537911