DocumentCode
3389763
Title
ASMC 2003. 14th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC) 2003. (Cat. No.03CH37406)
fYear
2003
fDate
March 31 2003-April 1 2003
Abstract
The following topics are dealt with: defect management; process control; industrial engineering; advanced process technology; yield management; and equipment productivity.
Keywords
integrated circuit manufacture; integrated circuit technology; integrated circuit yield; process control; production; semiconductor device manufacture; semiconductor technology; advanced process technology; defect management; equipment productivity; industrial engineering; process control; yield management;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI
Conference_Location
Munich, Germany
ISSN
1078-8743
Print_ISBN
0-7803-7681-1
Type
conf
DOI
10.1109/ASMC.2003.1194458
Filename
1194458
Link To Document