Title :
MEMS-based gravimetric sensors for explosives detection
Author :
Mlcak, Richard ; Doppalapudi, Dharanipal ; Pyzowski, Paul ; Gwynne, Patrick ; Purchase, Scott ; Bridgham, Jeffrey ; Schultz, Gerald ; Skelton, Martin ; Pelletier, David ; Tuller, Harry
Author_Institution :
Boston Microsyst., Inc., Woburn, MA, USA
Abstract :
A compact, rapid system for trace detection of explosives using MEMS-bases resonant structures is described. Various software algorithms are used to eliminate problems in previous implementations of array-based detectors. Results for detection of trace levels of explosives and other threat agents are given.
Keywords :
chemical sensors; explosives; gravimeters; micromechanical resonators; microsensors; piezoelectric devices; MEMS base resonant structure; array based detector; explosives detection; gravimetric sensors; trace detection; Chemical sensors; Chemicals; Explosives; Feature extraction; Micromechanical devices; Sensors; Silicon carbide; MEMS; chemical detection; explosives detection; silicon carbide; trace detection;
Conference_Titel :
Technologies for Homeland Security (HST), 2010 IEEE International Conference on
Conference_Location :
Waltham, MA
Print_ISBN :
978-1-4244-6047-2
DOI :
10.1109/THS.2010.5655033
