Title :
Fabrication Of Physical Sensors
Author :
Knutti, James W.
Author_Institution :
IC Sensors Inc.
Keywords :
Acceleration; Biosensors; Chemical and biological sensors; Chemical technology; Costs; Etching; Fabrication; Manufacturing; Seismic measurements; Silicon;
Conference_Titel :
Engineering in Medicine and Biology Society, 1990., Proceedings of the Twelfth Annual International Conference of the IEEE
Print_ISBN :
0-87942-559-8
DOI :
10.1109/IEMBS.1990.690917
