Title :
Simulation-based evaluation of the ramp-up behavior of waferfabs
Author :
Sturm, Roland ; Dorner, J. ; Reddig, Kevin ; Seidelmann, Joachim
Author_Institution :
Dept. Cleanroom Manuf., Fraunhofer Inst. for Manuf. Eng. & Autom., Stuttgart, Germany
fDate :
31 March-1 April 2003
Abstract :
In this paper we present a simulation study of wafer fab ramp-up scenarios with the simulation software AutoSched AP. A generic factory model (MIMAC 1 from Int. SEMATECH) was adapted to simulate fab ramp-up scenarios. The model was customized to consider time phased modeling capability and time phased reporting. Additionally, an evaluation approach for the comparison of different ramp-up simulation scenarios is presented. This approach helps to evaluate the ramp-up performance with different input parameters. A systematic variation of dispatch rules and lot sizes during ramp-up is shown.
Keywords :
digital simulation; dispatching; industrial control; integrated circuit manufacture; production control; production engineering computing; AutoSched AP; IC manufacturing; MIMAC 1; dispatch rules; generic factory model; input parameters; lot sizes; simulation software; simulation-based evaluation; time phased modeling capability; time phased reporting; wafer fab ramp-up behavior; waferfabs; Capacity planning; Manufacturing automation; Predictive models; Production facilities; Production planning; Pulp manufacturing; Semiconductor device manufacture; Semiconductor device modeling; Steady-state; Virtual manufacturing;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI
Print_ISBN :
0-7803-7681-1
DOI :
10.1109/ASMC.2003.1194478
