Authors/presenters

fYear

2003

fDate

March 31 2003-April 1 2003

Firstpage

326

Lastpage

330

Abstract

The author index contains an entry for each author and coauthor included in the proceedings record.

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI

Conference_Location

Munich, Germany

ISSN

1078-8743

Print_ISBN

0-7803-7681-1

Type

conf

DOI

10.1109/ASMC.2003.1194516

Filename

1194516

Link To Document