Modeling and simulation of ultrasonic motor driving jet-pipe servo valve system

This paper designs a prototype of a jet-pipe servo valve system driving by ultrasonic motor (USM) instead of the torque motor. Firstly, it describes the working principle of this new jet-pipe servo valve system. Secondly, the mathematical model is established using principle analysis and system identification. Then, it makes a simulation to the mathematical model and analyses its static and dynamic characteristics, and the accuracy of the mathematical model is proved through the experiments. According to the experiment data, the control accuracy and working pressure improve a lot. Finally, it analyses the performance of the pneumatic servo using this jet-pipe servo valve system, and proves the feasibility of its application in pneumatic servo.