Title :
Design of a 500kA, 100ns, 40pps Pulser to Power a IkW X-pinch Soft X-ray Source
Author :
Glidden, S.C. ; Hammer, D.A. ; Kalantar, D.H.
Keywords :
Costs; Microelectronics; Plasma sources; Plasma x-ray sources; Power generation; Pulse circuits; Pulse measurements; Resists; Wires; X-ray lithography;
Conference_Titel :
Power Modulator Symposium, 1992. Conference Record of the 1992 Twentieth
Print_ISBN :
0-7803-0718-6
DOI :
10.1109/MODSYM.1992.492524
