DocumentCode
3391267
Title
Design of a 500kA, 100ns, 40pps Pulser to Power a IkW X-pinch Soft X-ray Source
Author
Glidden, S.C. ; Hammer, D.A. ; Kalantar, D.H.
fYear
1992
fDate
23-25 Jun 1992
Firstpage
115
Keywords
Costs; Microelectronics; Plasma sources; Plasma x-ray sources; Power generation; Pulse circuits; Pulse measurements; Resists; Wires; X-ray lithography;
fLanguage
English
Publisher
ieee
Conference_Titel
Power Modulator Symposium, 1992. Conference Record of the 1992 Twentieth
Print_ISBN
0-7803-0718-6
Type
conf
DOI
10.1109/MODSYM.1992.492524
Filename
492524
Link To Document