Title :
Nano-motion stage for high speed and precision positioning on an X-Y plane
Author :
Mori, Shigeki ; Sato, Yuudai ; Sakurada, Akira ; Naganawa, Akihiro ; Shibuya, Yuki ; Obinata, Goro
Author_Institution :
AIT (Akita Res. Inst. of Adv. Technol.), Akita
Abstract :
Precision positioning technology with high speed on an X-Y plane requires to a manufacturing inspection for semiconductor and flat display areas, and so on. The authors proposed a new actuator called ldquoNano-Motion Actuator (NMA)rdquo for track following on a spin-stand that evaluated magnetic heads and media for high density magnetic recording. We applied technologies of the NMA to a new actuator mechanism that has two degrees of freedom. The actuator could position on the X-Y plane with manometer resolution.
Keywords :
actuators; magnetic heads; magnetic recording; microactuators; nanopositioning; X-Y plane; high density magnetic recording; magnetic heads; nanometer resolution; nanomotion actuator; spin-stand; Actuators; Disk recording; Displays; Fasteners; Inspection; Magnetic heads; Magnetic recording; Magnetooptic recording; Semiconductor device manufacture; Springs; X-Y plane; X-Y stage; actuator; displacement amplifying mechanism; elastic hinge; piezoelectric element; scanning; surface motion;
Conference_Titel :
Magnetic Recording Conference, 2009. APMRC '09. Asia-Pacific
Conference_Location :
Singapore
Print_ISBN :
978-9810-82191-3
DOI :
10.1109/APMRC.2009.4925423
