Nano-motion stage for high speed and precision positioning on an X-Y plane

Author

Mori, Shigeki ; Sato, Yuudai ; Sakurada, Akira ; Naganawa, Akihiro ; Shibuya, Yuki ; Obinata, Goro

Author_Institution

AIT (Akita Res. Inst. of Adv. Technol.), Akita

fYear

2009

fDate

14-16 Jan. 2009

Firstpage

1

Lastpage

2

Abstract

Precision positioning technology with high speed on an X-Y plane requires to a manufacturing inspection for semiconductor and flat display areas, and so on. The authors proposed a new actuator called ldquoNano-Motion Actuator (NMA)rdquo for track following on a spin-stand that evaluated magnetic heads and media for high density magnetic recording. We applied technologies of the NMA to a new actuator mechanism that has two degrees of freedom. The actuator could position on the X-Y plane with manometer resolution.

Keywords

actuators; magnetic heads; magnetic recording; microactuators; nanopositioning; X-Y plane; high density magnetic recording; magnetic heads; nanometer resolution; nanomotion actuator; spin-stand; Actuators; Disk recording; Displays; Fasteners; Inspection; Magnetic heads; Magnetic recording; Magnetooptic recording; Semiconductor device manufacture; Springs; X-Y plane; X-Y stage; actuator; displacement amplifying mechanism; elastic hinge; piezoelectric element; scanning; surface motion;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetic Recording Conference, 2009. APMRC '09. Asia-Pacific

Conference_Location

Singapore

Print_ISBN

978-9810-82191-3

Type

conf

DOI

10.1109/APMRC.2009.4925423

Filename

4925423