DocumentCode
3394764
Title
ICMTS 2005. Proceedings of the 2005 International Conference on Microelectronic Test Structures (IEEE Cat. No.05CH37622)
fYear
2005
fDate
4-7 April 2005
Abstract
The following topics are dealt with: CD metrology; process characterization; device characterization; parameter extraction; reliability; RF test structures; matching; capacitance; and interconnects.
Keywords
capacitance; integrated circuit interconnections; integrated circuit reliability; integrated circuit testing; CD metrology; RF test structures; capacitance; device characterization; interconnects; matching; microelectronic test structures; parameter extraction; process characterization; reliability;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 2005. ICMTS 2005. Proceedings of the 2005 International Conference on
Conference_Location
Leuven
Print_ISBN
0-7803-8855-0
Type
conf
DOI
10.1109/ICMTS.2005.1452191
Filename
1452191
Link To Document