Title :
ICMTS 2005. Proceedings of the 2005 International Conference on Microelectronic Test Structures (IEEE Cat. No.05CH37622)
Abstract :
The following topics are dealt with: CD metrology; process characterization; device characterization; parameter extraction; reliability; RF test structures; matching; capacitance; and interconnects.
Keywords :
capacitance; integrated circuit interconnections; integrated circuit reliability; integrated circuit testing; CD metrology; RF test structures; capacitance; device characterization; interconnects; matching; microelectronic test structures; parameter extraction; process characterization; reliability;
Conference_Titel :
Microelectronic Test Structures, 2005. ICMTS 2005. Proceedings of the 2005 International Conference on
Conference_Location :
Leuven
Print_ISBN :
0-7803-8855-0
DOI :
10.1109/ICMTS.2005.1452191
