Effect of electrode materials on breakdown of Al2O3/PI films

Nanohybrid polymers have many excellent properties, such as high dielectric constant, high dielectric strength and low loss and so on, which apply in the electricity and electron fields widely. In this paper, the nanohybrid Al₂O₃/PI films were prepared by Sol-Gel process, then, Au and Al were sputtered on the films surface respectively as electrode. The dielectric properties (dielectric constant, loss tangent and dielectric breakdown strength) of the samples were measured and the surface morphologies of the breakdown holes were observed by SEM. The experimental results show that the electrode materials effect on the dielectric properties and breakdown characteristics of nanohybrid PI films. The dielectric properties of the films deposited by Au are better than that of Al, and the size of breakdown hole is smaller.