Title :
Test structures for the characterization of deep trench isolation [The following paper has been withdrawn by the authors]
Author :
Hausser, S. ; Albus, R. ; Schligtenhorst, H.
Keywords :
Semiconductor device testing;
Conference_Titel :
Microelectronic Test Structures, 2005. ICMTS 2005. Proceedings of the 2005 International Conference on
Print_ISBN :
0-7803-8855-0
DOI :
10.1109/ICMTS.2005.1452209
