A novel test fixture with enhanced signal port isolation capability for on-wafer microwave measurements

A novel test fixture for on-wafer microwave measurements is proposed. It has an excellent isolation between signal ports. The proposed fixture has 15 dB and 30 dB lower forward coupling than commonly known shield-based and conventional fixtures, respectively, at 20 GHz. This is validated by measurements. Reliable open in-fixture performance in dummy de-embedding can be achieved by employing the proposed test fixture, since the proposed test fixture´s parasitic components are clear and evident. Furthermore, a short in-fixture is demonstrated. The test fixtures were fabricated using four metal layer 0.35 μm CMOS technology.