Title :
RF monitoring test structures for advanced RF technologies working up to 100GHz with less than 80μm width
Author :
Perrotin, Andre ; Gloria, Daniel
Author_Institution :
Central R&D, ST Microelectron., Crolles, France
Abstract :
A new RF test structure for monitoring of advanced silicon technologies and compatible with reduced scribe line dimensions (below 100 μm width) is presented. All DC and RF obtained results are compared with extraction on classical structures and are in good agreement up to 100 GHz. This new layout approach can be extended to device RF matching parameters such as Ft mismatch monitoring.
Keywords :
integrated circuit testing; monitoring; radiofrequency integrated circuits; silicon; RF monitoring; RF test structure; advanced RF technologies; advanced silicon technologies; device RF matching parameters; reduced scribe line dimensions; Condition monitoring; Hafnium; Heterojunction bipolar transistors; Optimized production technology; Parameter extraction; Radio frequency; Research and development; Silicon; Testing; Waveguide junctions;
Conference_Titel :
Microelectronic Test Structures, 2005. ICMTS 2005. Proceedings of the 2005 International Conference on
Print_ISBN :
0-7803-8855-0
DOI :
10.1109/ICMTS.2005.1452264
