Title :
Comparative study of electrical properties of PbLaZrTiOx capacitors with Al-doped ZnO and ITO top electrodes
Author :
Takada, Yasuhiro ; Tsuji, Takao ; Okamoto, N. ; Saito, Takashi ; Kondo, K. ; Yoshimura, Tetsuzo ; Fujimura, Naoki ; Higuchi, Kenichi ; Kitajima, A. ; Oshima, Akihiro
Author_Institution :
Dept. of Chem. Eng., Osaka Prefecture Univ., Sakai, Japan
Abstract :
PbLaZrTiOx (PLZT) thin films were deposited on Pt(111) substrate by the sol-gel method, then aluminum-doped zinc oxide (AZO) and indium tin oxide (ITO) top electrodes were deposited by pulsed laser deposition (PLD). We evaluated degradation characteristics by 3% hydrogen atmosphere annealing in 200°C, 1Torr. The polarization ratio of PLZT capacitors with 200 nm top electrodes thickness was maximum value at the same Pb contents. We also evaluated fatigue behavior by applying 10 V, 100 μs pulse width and 1 ms interval cycles. PLZT capacitors with AZO and ITO top electrodes were robust electrodes over 105 cycles compared with Pt top electrodes.
Keywords :
aluminium; annealing; electrodes; fatigue; ferroelectric capacitors; ferroelectric thin films; indium compounds; lanthanum compounds; lead compounds; pulsed laser deposition; sol-gel processing; zinc compounds; zirconium compounds; ITO; PbLaZrTiOx; PbLaZrTiOx capacitors; Pt; Pt(111) substrate; ZnO:Al; degradation characteristics; electrical properties; electrodes; fatigue; hydrogen atmosphere annealing; polarization ratio; pressure 1 torr; pulsed laser deposition; sol-gel method; temperature 200 degC; thin films; voltage 10 V; Annealing; Educational institutions; Laser applications; Power lasers; Radio frequency; conductive oxide electrode; fatigue; ferroelectric capacitor; hydrogen degradation; pulsed laser deposition;
Conference_Titel :
Applications of Ferroelectric and Workshop on the Piezoresponse Force Microscopy (ISAF/PFM), 2013 IEEE International Symposium on the
Conference_Location :
Prague
DOI :
10.1109/ISAF.2013.6748710
