Al(1−x)Sc(x)N thin films as promising non-ferroelectric materials for energy harvesting

Author

Matloub, Ramin ; Hadad, Mansour ; Sandu, C.S. ; Chidambaram, N. ; Mazzalai, A. ; Muralt, Paul ; Moulard, G. ; Metzger, Thomas

Author_Institution

Ceramics Lab., Ecole Polytech. Fed. de Lausanne, Lausanne, Switzerland

fYear

2013

fDate

21-25 July 2013

Firstpage

59

Lastpage

61

Abstract

We report on microstructure evolution and enhancement of longitudinal and transverse piezoelectric responses of AlN thin film with partial substitution of Al³⁺ ions by Sc³⁺ ions. Piezoelectric AlScN alloys are very promising for energy harvesting and sensor applications. AlScN 83/87 alloys exhibit a figure of merit that allows for a 60% efficiency increase as compared to pure AlN.

Keywords

III-V semiconductors; aluminium compounds; crystal microstructure; energy harvesting; piezoelectric semiconductors; piezoelectric thin films; scandium compounds; semiconductor thin films; Al_1-xSc_xN; energy harvesting; longitudinal piezoelectric responses; microstructure; nonferroelectric materials; thin films; transverse piezoelectric responses; Atomic measurements; Diffraction; Extraterrestrial measurements; Gain measurement; Lattices; Magnetosphere; Nitrogen; AlScN; Energy harvesting; Thin films; Transverse piezoelectric coefficient;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectric and Workshop on the Piezoresponse Force Microscopy (ISAF/PFM), 2013 IEEE International Symposium on the

Conference_Location

Prague

Type

conf

DOI

10.1109/ISAF.2013.6748728

Filename

6748728