Planar laser-micro machined bulk PZT bimorph For in-plane actuation

We demonstrate a PZT bimorph technology for integrated chip-scale in-plane nano-motion actuators. Bulk PZT actuators are micro-machined to define beams by laser-cutting through a PZT-4 plate while also defining arbitrary 2D electrode patterns on top and bottom surface of the beams by using a commercial laser cutting tool with backside alignment capability. Lateral actuators that are 5, 10 and 20 mm long, 0.45 mm wide, and 0.5 mm thick were characterized with single and dual side laser patterned electrodes. The in-plane bimorph displacements are in the range of 0.02 to 0.64 microns/volt. The out of plane displacement sensitivity of these actuators were simulated to be ~ 100´s ppm/V compared to the desired in plane actuation. We also report doubling of the actuator tip displacement for the same applied voltages in the dual side electrode actuators, when compared to the single sided actuators.