• DocumentCode
    3398144
  • Title

    The Effect of p-InGaN layer on ITO based ohmic contacts to p-GaN

  • Author

    Han, Yanjun ; Liu, Zhongtao ; Luo, Yi ; Ma, Hongxia ; Zhang, Xianpeng ; Wang, Lai

  • Author_Institution
    Tsinghua Univ., Beijing
  • fYear
    2007
  • fDate
    July 29 2007-Aug. 11 2007
  • Firstpage
    90
  • Lastpage
    91
  • Abstract
    By epitaxy of a thin p-lnGaN layer on p-GaN surface and optimization of InGaN/GaN heterostructures annealing condition, ohmic contact to p-GaN with high transparency was obtained by using electron beam evaporated indium tin oxide film.
  • Keywords
    III-V semiconductors; annealing; epitaxial growth; gallium compounds; indium compounds; ohmic contacts; semiconductor epitaxial layers; semiconductor heterojunctions; ITO; InGaN-GaN; annealing; epitaxy; heterostructures; indium tin oxide film; ohmic contacts; transparency; Annealing; Contact resistance; Epitaxial growth; Gallium nitride; Indium tin oxide; Laboratories; Light emitting diodes; Ohmic contacts; Sheet materials; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano-Optoelectronics Workshop, 2007. i-NOW '07. International
  • Conference_Location
    Beijing
  • Print_ISBN
    978-1-4244-1591-5
  • Type

    conf

  • DOI
    10.1109/INOW.2007.4302897
  • Filename
    4302897