Title :
Room Temperature Continuous Wave Operation of Equilateral-Triangle-Resonator Lasers
Author :
Hu, Yong-Hong ; Chen, Qin ; Huang, Yong-Zhen
Author_Institution :
Chinese Acad. Sci., Bejing
fDate :
July 29 2007-Aug. 11 2007
Abstract :
Electrically injected InGaAsP/lnP equilateral-triangle-resonator (ETR) lasers with an output waveguide were fabricated using standard photolithography, inductively coupled plasma (ICP) etching and wet etching. Lasing spectra of a laser with 25mum side length was obtained at room temperature under cw injection.
Keywords :
III-V semiconductors; etching; gallium arsenide; indium compounds; photolithography; semiconductor lasers; InGaAsP-InP; equilateral-triangle-resonator lasers; inductively coupled plasma etching; lasing spectra; photolithography; room temperature continuous wave operation; wet etching; Chemical lasers; Laser theory; Lithography; Optical pumping; Optical waveguides; Plasma temperature; Scanning electron microscopy; Semiconductor lasers; Waveguide lasers; Wet etching;
Conference_Titel :
Nano-Optoelectronics Workshop, 2007. i-NOW '07. International
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-1591-5
DOI :
10.1109/INOW.2007.4302917
