Performance analysis of stress dissipative structure sensor

The sensitivity and linearity are main parameters of piezoresistive pressure sensor. And the diaphragm structure of sensor´ chip has a significant impact on sensitivity and linearity. For this reason, this paper analyses and calculates the diaphragm parameters of the sensor chip. The stress dissipative structure has been designed in this paper, and the mask structure is discussed in detail. Related Properties, such as sensitivity, linearity and frequency et al, have been calculated by the applications of finite element analyses (FEA) software. So, this paper, for accelerating the design of sensor chip, offers an valuable foundation.