Title :
Design and performance of UHF and L-band oscillators using thin-film resonators on semiconductor substrates
Author :
Burns, Stanley G. ; Weber, Robert J.
Author_Institution :
Dept. of Electr. Eng. & Comput. Eng., Iowa State Univ., Ames, IA, USA
Abstract :
The authors report on the use of sputter-deposited, thin-film, aluminum nitride resonators as the feedback element in hybrid single-mode, combline, and voltage-controlled UHF and L-band oscillators. The resonators have also been cointegrated on the same substrate with 2-GHz BJTs (bipolar junction transistors). Design techniques and suggestions for novel architectures using this technology are presented
Keywords :
MMIC; hybrid integrated circuits; microwave integrated circuits; microwave oscillators; radiofrequency oscillators; thin film circuits; variable-frequency oscillators; 2 GHz; AlN resonators; BJTs; L-band; UHF; bipolar junction transistors; combline; compatible piezoelectric/semiconductor microwave process; feedback element; hybrid single-mode oscillators; oscillators; semiconductor substrates; sputter-deposited; thin-film resonators; voltage-controlled; Filters; Frequency control; L-band; Piezoelectric films; Semiconductor thin films; Sputtering; State feedback; Substrates; Voltage-controlled oscillators; Zinc oxide;
Conference_Titel :
Circuits and Systems, 1991., Proceedings of the 34th Midwest Symposium on
Conference_Location :
Monterey, CA
Print_ISBN :
0-7803-0620-1
DOI :
10.1109/MWSCAS.1991.252038
