Title :
Design and simulation of two port RF MEMS resonators
Author :
Sundaram, G. Meenakshi ; Angira, Mahesh ; Rangra, Kamaljit
Author_Institution :
EEE Dept., BITS, Pilani, India
Abstract :
This paper presents detail analysis of MEMS Fixed Fixed beam resonator. Force voltage analogy is being used here for calculating electrical two port equivalent circuit and its component values. Its resonance frequency tuning behavior analyzed by varying dc bias voltages ranging from 0 V to 10 V. The resonant frequency variation with varying elctode air gap is also prediticted.
Keywords :
air gaps; equivalent circuits; micromechanical resonators; oscillators; two-port networks; MEMS fixed fixed beam resonator; electrical two port equivalent circuit; electrode air gap; force voltage analogy; resonance frequency tuning behavior; resonant frequency variation; two port RF MEMS resonators; voltage 0 V to 10 V; Atmospheric modeling; Electrodes; Integrated circuit modeling; Mathematical model; Micromechanical devices; Radio frequency; Resonant frequency; ADS; RF MEMS; fixed-fixed; oscillators; resonator;
Conference_Titel :
Computer Communication and Informatics (ICCCI), 2012 International Conference on
Conference_Location :
Coimbatore
Print_ISBN :
978-1-4577-1580-8
DOI :
10.1109/ICCCI.2012.6158849
