An offset-compensated switched-capacitor interface circuit for closed-loop MEMS capacitive accelerometer

Author

Ting-ting Zhang ; Hao-Jiong Li ; Jing-Qing Huang ; Meng Zhao ; Li-Chen Hong ; Ya-Cong Zhang ; Wen-Gao Lu ; Zhong-Jian Chen

Author_Institution

Dept. of Microelectron., Peking Univ., Beijing, China

fYear

2012

fDate

Oct. 29 2012-Nov. 1 2012

Firstpage

1

Lastpage

3

Abstract

This paper presents a switched-capacitor readout circuit designed for the closed-loop MEMS capacitive accelerometer with a full scale of ±2g. The offset voltage of amplifiers is compensated and the low-frequency noise is reduced by using CDS technique, thus the precision of the whole system is significantly improved. The chip has been fabricated in a 0.35μm 15V CMOS technology and the equivalent noise acceleration (ENA) of the whole accelerometer system is tested to be 950ng/VHz at 120Hz in atmosphere.

Keywords

CMOS integrated circuits; accelerometers; amplifiers; capacitive sensors; detector circuits; microsensors; noise; readout electronics; switched capacitor networks; CMOS technology; amplifier offset voltage; closed-loop MEMS capacitive accelerometer; equivalent noise acceleration; offset compensated switched capacitor interface circuit; size 0.35 mum; switched capacitor readout circuit; voltage 15 V; Accelerometers; Equations; Mathematical model; Micromechanical devices; Noise; Sensors; Switching circuits;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated Circuit Technology (ICSICT), 2012 IEEE 11th International Conference on

Conference_Location

Xi´an

Print_ISBN

978-1-4673-2474-8

Type

conf

DOI

10.1109/ICSICT.2012.6466759

Filename

6466759