Title :
Technology and Properties of CrN Films Deposited by Multi-Arc Ion Plating
Author :
Yao, Xiaoming ; Ling, Xiaoming ; Jin, Qi ; Fan, Duowang
Author_Institution :
Lanzhou Jiaotong Univ., Lanzhou
fDate :
July 29 2007-Aug. 11 2007
Abstract :
CrN films were deposited using Multi Arc Ion equipment on M35 steel. The experiment results indicate that the flow ratio of N2 to Ar play an important role in the properties of films.
Keywords :
chromium compounds; hardness; ion beam assisted deposition; CrN; FeCJk; M35 steel; deposition parameters; films performance; flow ratio; hardness; multiarc ion plating; Argon; Building materials; Chromium; Cleaning; Educational technology; Intelligent control; Steel; Temperature; Tin; Voltage;
Conference_Titel :
Nano-Optoelectronics Workshop, 2007. i-NOW '07. International
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-1591-5
DOI :
10.1109/INOW.2007.4303000
