Title :
Dependence of thin film growth on substrate temperature Kinetic Monte Carlo simulation of thin film growth
Author :
Zheng, Xiao-Ping ; Zhang, Pei-Feng ; Fan, Duo-Wang
Author_Institution :
Lanzhou Jiaotong Univ., Lanzhou
fDate :
July 29 2007-Aug. 11 2007
Abstract :
A three-dimensional KMC technique has been developed for simulating growth of thin films. The surface roughness and the relative density of the films were simulated as functions of growth substrate temperature and deposition rate.
Keywords :
Monte Carlo methods; surface roughness; thin films; relative density; substrate temperature; surface roughness; thin film growth; three-dimensional kinetic Monte Carlo simulation; Educational technology; Information science; Intelligent control; Kinetic theory; Laboratories; Rough surfaces; Substrates; Surface roughness; Temperature dependence; Transistors;
Conference_Titel :
Nano-Optoelectronics Workshop, 2007. i-NOW '07. International
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-1591-5
DOI :
10.1109/INOW.2007.4303006
