DocumentCode
3401113
Title
Improvement of spatial resolution of semiconductors’ microwave microscopy
Author
Gordienko, Yu.Ye. ; Melnik, S.I. ; Slipchenko, N.I. ; Ischenko, A.L.
Author_Institution
Kharkov Nat. Univ. of Radioelectron., Kharkov
fYear
2008
fDate
8-12 Sept. 2008
Firstpage
546
Lastpage
547
Abstract
The information method of increasing spatial resolution of microwave microscopy is offered. In order to decide the problem of reconstruction of bidimentional distribution local inclusions on the specified depth, double-step algorithm has been created.
Keywords
inclusions; microwave devices; semiconductor devices; bidimentional distribution local inclusion reconstruction; double-step algorithm; semiconductor microwave microscopy; specified depth; IEEE catalog; Metallization; Microscopy; Microwave technology; Organizing; Spatial resolution;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave & Telecommunication Technology, 2008. CriMiCo 2008. 2008 18th International Crimean Conference
Conference_Location
Sevastopol, Crimea
Print_ISBN
978-966-335-166-7
Electronic_ISBN
978-966-335-169-8
Type
conf
DOI
10.1109/CRMICO.2008.4676496
Filename
4676496
Link To Document