Title :
Improvement of spatial resolution of semiconductors’ microwave microscopy
Author :
Gordienko, Yu.Ye. ; Melnik, S.I. ; Slipchenko, N.I. ; Ischenko, A.L.
Author_Institution :
Kharkov Nat. Univ. of Radioelectron., Kharkov
Abstract :
The information method of increasing spatial resolution of microwave microscopy is offered. In order to decide the problem of reconstruction of bidimentional distribution local inclusions on the specified depth, double-step algorithm has been created.
Keywords :
inclusions; microwave devices; semiconductor devices; bidimentional distribution local inclusion reconstruction; double-step algorithm; semiconductor microwave microscopy; specified depth; IEEE catalog; Metallization; Microscopy; Microwave technology; Organizing; Spatial resolution;
Conference_Titel :
Microwave & Telecommunication Technology, 2008. CriMiCo 2008. 2008 18th International Crimean Conference
Conference_Location :
Sevastopol, Crimea
Print_ISBN :
978-966-335-166-7
Electronic_ISBN :
978-966-335-169-8
DOI :
10.1109/CRMICO.2008.4676496
