Title :
From the MEMS idea to the MEMS product: CAD and foundries
Author :
Karam, J.M. ; Courtois, B.
Author_Institution :
TIMA/CMP, Grenoble, France
Abstract :
Besides foundry facilities, computer-aided design (CAD) tools are also required to move microsystems from research prototypes to an industrial market. Currently available CAD tools need extensions before they can be used for the automated design of micromachined devices. This paper presents a low cost access to microsystem technology (MST), applied by the CMP service, and based on the use of existing microelectronics production lines, with additional post-processing for microsystem specific 2D and 3D structures, and a global CAD approach for the design and simulation of microsystems applied to currently available commercial CAD tools, e.g. Mentor Framework, in order to ensure a continuous flow from the design to the manufacturing
Keywords :
CAD/CAM; circuit CAD; design for manufacture; micromechanical devices; 2D structures; 3D structures; CAD; MEMS; Mentor Framework; automated design; commercial CAD tools; computer-aided design; continuous flow; design; foundries; global CAD approach; industrial market; microelectronics production lines; micromachined devices; microsystem technology; microsystems; post-processing; research prototypes; simulation; Costs; Design automation; Foundries; Manufacturing; Microelectronics; Micromachining; Micromechanical devices; Production; Prototypes; Silicon;
Conference_Titel :
WESCON/96
Conference_Location :
Anaheim, CA
Print_ISBN :
0-7803-3274-1
DOI :
10.1109/WESCON.1996.553966