DocumentCode
3401588
Title
Some approaches to creation of the method of formation of nanoelectronic structures with high reproducibility
Author
Zolot, A.I. ; Hodakovskij, N.I.
Author_Institution
V. Glushkov Inst. of Cybern., NAS of Ukraine, Kiev
fYear
2008
fDate
8-12 Sept. 2008
Firstpage
602
Lastpage
603
Abstract
Methods of correction of initial models of work of scanning systems are offered on the basis of scanning tunnel microscope (STM) and methods of elimination of the mistakes caused by features of linear and nonlinear elements of scanning system are determined.
Keywords
nanoelectronics; nanofabrication; scanning tunnelling microscopy; STM; nanoelectronic structures; scanning systems; scanning tunnel microscope; Cybernetics; IEEE catalog; Indium tin oxide; Microwave technology; Nanostructures; Organizing; Reproducibility of results;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave & Telecommunication Technology, 2008. CriMiCo 2008. 2008 18th International Crimean Conference
Conference_Location
Sevastopol, Crimea
Print_ISBN
978-966-335-166-7
Electronic_ISBN
978-966-335-169-8
Type
conf
DOI
10.1109/CRMICO.2008.4676521
Filename
4676521
Link To Document