Title :
Some approaches to creation of the method of formation of nanoelectronic structures with high reproducibility
Author :
Zolot, A.I. ; Hodakovskij, N.I.
Author_Institution :
V. Glushkov Inst. of Cybern., NAS of Ukraine, Kiev
Abstract :
Methods of correction of initial models of work of scanning systems are offered on the basis of scanning tunnel microscope (STM) and methods of elimination of the mistakes caused by features of linear and nonlinear elements of scanning system are determined.
Keywords :
nanoelectronics; nanofabrication; scanning tunnelling microscopy; STM; nanoelectronic structures; scanning systems; scanning tunnel microscope; Cybernetics; IEEE catalog; Indium tin oxide; Microwave technology; Nanostructures; Organizing; Reproducibility of results;
Conference_Titel :
Microwave & Telecommunication Technology, 2008. CriMiCo 2008. 2008 18th International Crimean Conference
Conference_Location :
Sevastopol, Crimea
Print_ISBN :
978-966-335-166-7
Electronic_ISBN :
978-966-335-169-8
DOI :
10.1109/CRMICO.2008.4676521
