Title :
Real-time subnanometer position sensing with long measurement range
Author :
Ohara, Tetsuo ; Youcef-Toumi, Kamal
Author_Institution :
Lab. for Manuf. & Productivity, MIT, Cambridge, MA, USA
Abstract :
Proposes real-time position sensing devices with subnanometer precision. The precision level sought is in the range of 10-9 m to 10-12 m with long range capability on the order of 8-12 inches. These devices will use either synthetic gratings or an atomic layer of a material, such as graphite, as the reference scales in conjunction with scanning probe microscope (SPM) technologies. This paper discusses the feasibility of the proposed subnanometer position sensing concept, with preliminary experimental results
Keywords :
computerised instrumentation; holographic gratings; piezoelectric actuators; position measurement; scanning probe microscopy; 8 to 12 inch; long range capability; real-time subnanometer position sensing; scanning probe microscope; subnanometer precision; synthetic gratings; Costs; Electrical equipment industry; Gratings; Interferometers; Laboratories; Manufacturing industries; Position measurement; Scanning probe microscopy; Wavelength measurement; Weight control;
Conference_Titel :
Robotics and Automation, 1995. Proceedings., 1995 IEEE International Conference on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-1965-6
DOI :
10.1109/ROBOT.1995.525312
