Title :
Batch-produced microfabricated ion-selective electrodes: reproducibility, reliability and yields
Author :
Neuman, Michael R. ; Buck, Richard P. ; Ash, R. Bruce ; Johnson, Timothy A. ; Erdosy, Miklos ; Ufer, Stefan ; Cosofret, Vasile V.
Author_Institution :
Metro Health Med. Center, Case Western Reserve Univ., Cleveland, OH, USA
Abstract :
Thick-film H+ and K+ selective sensors based on solvent polymeric neutral carrier membranes have been batch fabricated on flexible polyimide substrates using photolithographic microelectronic technology. Batch-produced sensors show yields of up to 74% with stable, near Nernstian characteristics. The sensor design and construction make it possible for inexpensive and mass production
Keywords :
biomedical electronics; biomedical equipment; biomedical measurement; chemical sensors; electrodes; photolithography; thick film circuits; H; K; K+ selective sensors; batch-produced microfabricated ion-selective electrodes; batch-produced sensors; electrode reliability; electrode reproducibility; flexible polyimide substrates; inexpensive mass production; near Nernstian characteristics; photolithographic microelectronic technology; sensor construction; sensor design; solvent polymeric neutral carrier membranes; thick-film H+ sensors; Biomembranes; Biosensors; Electrodes; Polyimides; Polymers; Production; Reproducibility of results; Sensor arrays; Sensor phenomena and characterization; Solvents;
Conference_Titel :
Engineering in Medicine and Biology Society, 1995., IEEE 17th Annual Conference
Conference_Location :
Montreal, Que.
Print_ISBN :
0-7803-2475-7
DOI :
10.1109/IEMBS.1995.579825